POWER SUPPLY DEVICE, TEST APPARATUS USING THE SAME, AND CONTROL METHOD OF POWER SUPPLY VOLTAGE

摘要

PROBLEM TO BE SOLVED: To control power supply voltage at an optional target waveform.SOLUTION: A main power supply supplies power supply voltage Vto a load. A compensation circuit, when controlling the power supply voltage Vat an optional target waveform, supplies a compensation current i. A compensation current waveform calculation part 100 calculates a waveform of the compensation current i. A first waveform acquisition prat 102 acquires a first waveform v(t) to be a variation waveform of the power supply voltage when predetermined impedance variation is generated in the load. A second waveform acquisition part 104 acquires a second waveform v(t) to be a target waveform. A third waveform acquisition prat 106 acquires a third waveform z(t) to be an impulse response waveform to a pulse current of the power supply voltage V. A deconvolution processing part 108 calculates a fourth waveform i(t) for describing a waveform of the compensation current by performing deconvolution operation of the third waveform z(t) to a difference v(t)-v(t) between the second waveform v(t) and the first waveform v(t).