| 摘要 |
PROBLEM TO BE SOLVED: To suppress variation in magnitude of outputs from respective sensors even when misalignment occurs between formation positions of a detection coil, a reference coil, and a driving coil, which comprise planar coils.SOLUTION: A differential transformer type magnetic sensor 3a includes a first coil layer 21, a second coil layer 23, and an insulation layer 25 formed between the first coil layer 21 and the second coil layer 23. The first coil layer 21 has a whorl pattern where a first wire and a second wire are wound in parallel in a same direction on a same plane. The first wire forms a detection coil 4. The second wire forms a first driving coil 5. The second coil layer 23 has a whorl pattern where a third wire and a fourth wire are wound in parallel in a same direction on a same plane. The third wire forms a reference coil 6. The fourth wire forms a second driving coil 7. |
