发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method of producing the same, capable of suppressing a cost without complicating a production process by forming a thin-film transistor by using an oxide semiconductor film represented by zinc oxide.SOLUTION: In a semiconductor device, a gate electrode is formed on a substrate, a gate insulating film is formed so as to cover the gate electrode, an oxide semiconductor film is formed on the gate insulating film, and first and second conductive films are formed on the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel formation region.
申请公布号 JP2014075591(A) 申请公布日期 2014.04.24
申请号 JP20130239523 申请日期 2013.11.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 AKIMOTO KENGO;HONDA TATSUYA;SONE HIROTO
分类号 H01L29/786;G02F1/1368;G02F1/167;H01L21/20;H01L21/336;H01L51/50 主分类号 H01L29/786
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