发明名称 POSITIONING METHOD OF TRANSFER MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a positioning method of a transfer mechanism which can suppress the risk that a pick interferes with a workpiece, by enhancing workability and reducing variation between workers.SOLUTION: The positioning method of a transfer mechanism having picks 48, 50 on which a plurality of mounting pads 54, 56 for mounting a workpiece on the upper surface are formed so as to be able to approach to or separate from a holding part M for holding a workpiece W includes a first step for intruding the tip of the pick under the workpiece held in the holding part, a second step for determining the height position of the pick by raising the pick and bringing the mounting pad provided at the tip of the pick into contact with the lower surface on the periphery of the workpiece, and a third step for determining the intrusion height reference position, i.e., the intrusion height of the pick for the holding part based on the height position.
申请公布号 JP2014075397(A) 申请公布日期 2014.04.24
申请号 JP20120220886 申请日期 2012.10.03
申请人 TOKYO ELECTRON LTD 发明人 OKANO SHINYA;SUGIMOTO TAKASHI;TOYODA YOSHINORI
分类号 H01L21/68 主分类号 H01L21/68
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