发明名称 RESIN COMPOSITION FOR PROTECTIVE FILM FORMATION, PROTECTIVE FILM, METHOD FOR FORMING PATTERN, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
摘要 Provided is a resin composition for protective film formation, a protective film, and a method for forming a pattern capable of forming a protective film having a uniform film thickness with no peeling or application imperfections on the substrate or the film formed on the substrate, whereby in pattern formation using a developing fluid containing an organic solvent, a very fine and uniform pattern can be formed. Also provided is a method for forming a pattern capable of forming a desired pattern on an organic semiconductor film using the formed resist and the protective film pattern as a mask, and subsequently capable of removing the resist and protective film pattern used as a mask without damaging the underlying organic semiconductor film. Also provided is an electronic device manufactured using a method for manufacturing an electronic device including the method for forming a pattern. A resin composition based on the developing fluid containing an organic solvent used in developing for pattern formation, the resin composition used to form a protective film for protecting a substrate or a film formed on the substrate, and the resin composition containing water and at least two resins having a hydroxy group, the resins having differing main chain structures.
申请公布号 WO2014061708(A1) 申请公布日期 2014.04.24
申请号 WO2013JP78098 申请日期 2013.10.16
申请人 FUJIFILM CORPORATION 发明人 IWAI YU;NAKAMURA ATSUSHI;KAMOCHI YOSHITAKA;YOSHIDA MASAFUMI
分类号 H01L21/027;G03F7/038;G03F7/039;G03F7/11;G03F7/32;H01L21/3065;H01L21/312 主分类号 H01L21/027
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