发明名称 |
SEMICONDUCTOR HAVING DIFFERENT VOID DIRECTION ISOLATION AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>A semiconductor device includes a semiconductor substrate, a first device isolation layer which has a flat-type void formed in a direction parallel to the semiconductor substrate, a second device isolation layer which has a fin-type void formed in a direction vertical to the semiconductor substrate for reducing a void area in the fin-type void, and a transistor electrode which is formed between the second device isolation layers and in front and back of the second device isolation layer.</p> |
申请公布号 |
KR20140048519(A) |
申请公布日期 |
2014.04.24 |
申请号 |
KR20120114558 |
申请日期 |
2012.10.16 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK, JE MIN |
分类号 |
H01L21/762;H01L21/336;H01L29/78 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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