发明名称 SEMICONDUCTOR HAVING DIFFERENT VOID DIRECTION ISOLATION AND METHOD FOR MANUFACTURING SAME
摘要 <p>A semiconductor device includes a semiconductor substrate, a first device isolation layer which has a flat-type void formed in a direction parallel to the semiconductor substrate, a second device isolation layer which has a fin-type void formed in a direction vertical to the semiconductor substrate for reducing a void area in the fin-type void, and a transistor electrode which is formed between the second device isolation layers and in front and back of the second device isolation layer.</p>
申请公布号 KR20140048519(A) 申请公布日期 2014.04.24
申请号 KR20120114558 申请日期 2012.10.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, JE MIN
分类号 H01L21/762;H01L21/336;H01L29/78 主分类号 H01L21/762
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