发明名称 SYSTEMS, METHODS AND MATERIALS INCLUDING CRYSTALLIZATION OF SUBSTRATES VIA SUB-MELT LASER ANNEAL, AS WELL AS PRODUCTS PRODUCED BY SUCH PROCESSES
摘要 Systems, methods, and products of processes consistent with the innovations herein relate to aspects involving crystallization of layers on substrates. In one exemplary implementation, there is provided a method of fabricating a device. Moreover, such method may include placing an amorphous/poly material on a substrate and heating the material via a sub-melt laser anneal process to transform the material into crystalline form.
申请公布号 EP2599110(A4) 申请公布日期 2014.04.23
申请号 EP20100806937 申请日期 2010.07.28
申请人 GIGASI SOLAR, INC. 发明人 PRABHAKAR, VENKATRAMAN
分类号 H01L21/324;H01L21/20;H01L21/268;H01L29/786;H01L31/028;H01L31/0368;H01L31/0376;H01L31/068 主分类号 H01L21/324
代理机构 代理人
主权项
地址