| 摘要 |
An apparatus for processing liquid of disc-shaped articles includes a spin chuck, and at least three individually controllable infrared heating elements. The infrared heating elements are mounted onto the spin chuck in a stationary manner with regard to the rotation of the spin chuck. When deciding the positions for the infrared heating elements on the spin chuck, the infrared heating elements are arranged in a nested composition, in order to define the individually controllable interior, central, and exterior heating zones, which are adjacent to the disc-shaped articles. |
