发明名称 |
Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same |
摘要 |
The present invention relates generally to the detection of high energy radiation. The present invention relates more particularly to the film bulk acoustic wave resonator-based devices, and their use in the detection of high energy radiation. One aspect of the invention is a method for detecting high energy radiation, the method comprising providing a film bulk acoustic wave resonator having a zinc oxide piezoelectric layer in substantial contact with a dielectric layer; exposing the film bulk acoustic wave resonator to the high energy radiation; determining the resonant frequency of the film bulk acoustic wave resonator; and determining the dose of high energy radiation using the resonant frequency of the film bulk acoustic wave resonator. |
申请公布号 |
US8704191(B2) |
申请公布日期 |
2014.04.22 |
申请号 |
US201113513287 |
申请日期 |
2011.01.20 |
申请人 |
YU HONGYU;OILER JONATHON KEITH;BARNABY HUGH JAMES;ARIZONA BOARD OF REGENTS, A BODY CORPORATE OF THESTATE OF ARIZONA, ACTING FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY |
发明人 |
YU HONGYU;OILER JONATHON KEITH;BARNABY HUGH JAMES |
分类号 |
G01T1/16;G01N29/036;G01T1/161 |
主分类号 |
G01T1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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