发明名称 |
Thin-film transistor array substrate and manufacturing method thereof |
摘要 |
The present invention discloses a thin-film transistor (TFT) array substrate and a manufacturing method thereof. Depositing a transparent conductive layer and a first metal layer in turn on a substrate patterned by a first multi-tone mask (MTM) to form a gate, a common electrode and a reflecting layer; depositing a gate insulation layer and a semiconductor layer patterned by a second MTM to remain the semiconductor layer on the gate; and depositing a second metal layer patterned by a third MTM to form a source and a drain. |
申请公布号 |
US8703559(B2) |
申请公布日期 |
2014.04.22 |
申请号 |
US201213574243 |
申请日期 |
2012.05.09 |
申请人 |
HUANG HUA;JIA PEI;SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
HUANG HUA;JIA PEI |
分类号 |
H01L21/84;H01L21/00 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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