新颖之光酸产生剂及使用其之光阻材料与图型之形成方法,申请号TW098114446-传众专利搜索

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发明名称	新颖之光酸产生剂及使用其之光阻材料与图型之形成方法
摘要
申请公布号	TWI435170	申请公布日期	2014.04.21
申请号	TW098114446	申请日期	2009.04.30
申请人	信越化学工业股份有限公司日本	发明人	大桥正树;大泽洋一;金生刚;渡边武
分类号	G03F7/004;C07J31/00;C07C381/12;G03F7/039;H01L21/027	主分类号	G03F7/004
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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