发明名称 |
PROCESSING DEVICE FOR CERAMIC MATERIAL, AND EVALUATING METHOD FOR PROCESSING OF CERAMIC MATERIAL |
摘要 |
PROBLEM TO BE SOLVED: To prevent troubles caused by failure found in the last stage, by evaluating the formation of a split groove.SOLUTION: A processing device for ceramic materials comprises: a laser device irradiating a laser beam which processes a ceramic material; a drive unit which moves a relative position between the ceramic material and the laser beam; a laser processing beam detector which detects a laser processing beam of the ceramic material; a laser processing beam diameter measuring part which measures a diameter of the laser processing beam detected by the laser processing beam detector. |
申请公布号 |
JP2014072375(A) |
申请公布日期 |
2014.04.21 |
申请号 |
JP20120217334 |
申请日期 |
2012.09.28 |
申请人 |
KOA CORP |
发明人 |
MATSUMOTO KENTARO;KATO SHUN |
分类号 |
H05K3/00;B23K26/00;B28D7/00 |
主分类号 |
H05K3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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