| 摘要 |
PROBLEM TO BE SOLVED: To enhance productivity of a solar panel, by enhancing the inspection efficiency of scribe line processing greatly.SOLUTION: Upon finishing the processing of scribe lines on a glass substrate by means of laser light, a control unit 206 controls a drive unit 204 to lower a resistance measuring instrument 203 and to bring it into contact with the glass substrate on which a thin film is formed between the scribe lines thus processed, before measuring the insulation resistance value. A resistance determination unit 207 compares the insulation resistance value measured by the resistance measuring instrument 203 with an insulation resistance threshold value stored in a memory 210, and determines that processing of the scribe lines is poor if the insulation resistance value is smaller than the insulation resistance threshold value. When a determination is made that processing of the scribe lines is poor, the control unit 206 controls to process the scribe lines again. |
