光阻组合物,申请号TW097125765-传众专利搜索

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发明名称	光阻组合物
摘要
申请公布号	TWI435174	申请公布日期	2014.04.21
申请号	TW097125765	申请日期	2008.07.08
申请人	ＡＺ电子材料ＩＰ股份有限公司日本	发明人	斯林伐珊　嘉克拉伐尼;穆尼拉席那　佩德曼那班;穆西亚　希亚哥拉贞;工藤隆范;大卫Ｌ　蓝齐威兹
分类号	G03F7/027;G03F7/004;C08F20/10;C08F20/28;H01L21/027	主分类号	G03F7/027
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项
地址	日本

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