基板台、微影装置及使用微影装置制造元件之方法,申请号TW100105308-传众专利搜索

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发明名称	基板台、微影装置及使用微影装置制造元件之方法
摘要
申请公布号	TWI435187	申请公布日期	2014.04.21
申请号	TW100105308	申请日期	2011.02.17
申请人	ＡＳＭＬ荷兰公司荷兰	发明人	卡内科　塔克许;欧顿　乔斯特　捷恩;拉法瑞　雷孟德　威黑墨斯　路易斯
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项
地址	荷兰

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