| 摘要 |
<p>An acoustic wave device includes: a substrate; a lower electrode that is located on the substrate; a piezoelectric film that is located on the lower electrode and made of aluminum nitride of which a ratio of a lattice constant in a c-axis direction to a lattice constant in an a-axis direction is smaller than 1.6; and an upper electrode that is located on the piezoelectric film and faces the lower electrode across the piezoelectric film.</p> |
