发明名称 SEMICONDUCTOR DEVICE AND FABRICATED METHOD THEREOF
摘要 Provided is a semiconductor device and a method of fabricating the same. The semiconductor device includes a substrate having first and second areas separated from each other; a structure formed on the substrate and formed by alternately laminating at least one sacrificial layer and at least one active layer; a first gate-all-around device formed in a first area and including a first nanowire; and a second gate-all-around device formed in a second area and including a second nanowire. The first nanowire is formed at the same level as that of a first active layer among the at least one active layer, and the second nanowire is formed at the same level as that of a second active layer among the at least one active layer. The first active layer is different from the second active layer.
申请公布号 KR20140046258(A) 申请公布日期 2014.04.18
申请号 KR20120112510 申请日期 2012.10.10
申请人 SAMSUNG ELECTRONICS CO., LTD.;SNU R&DB FOUNDATION 发明人 SUN, MIN CHUL;PARK, BYUNG GOOK
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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