发明名称 |
SEMICONDUCTOR DEVICE AND FABRICATED METHOD THEREOF |
摘要 |
Provided is a semiconductor device and a method of fabricating the same. The semiconductor device includes a substrate having first and second areas separated from each other; a structure formed on the substrate and formed by alternately laminating at least one sacrificial layer and at least one active layer; a first gate-all-around device formed in a first area and including a first nanowire; and a second gate-all-around device formed in a second area and including a second nanowire. The first nanowire is formed at the same level as that of a first active layer among the at least one active layer, and the second nanowire is formed at the same level as that of a second active layer among the at least one active layer. The first active layer is different from the second active layer. |
申请公布号 |
KR20140046258(A) |
申请公布日期 |
2014.04.18 |
申请号 |
KR20120112510 |
申请日期 |
2012.10.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;SNU R&DB FOUNDATION |
发明人 |
SUN, MIN CHUL;PARK, BYUNG GOOK |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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