发明名称 METAL GATE FINFET DEVICE AND METHOD OF FABRICATING THEREOF
摘要 A device including a substrate having a fin. A metal gate structure is formed on the fin. The metal gate structure includes a stress metal layer formed on the fin such that the stress metal layer extends to a first height from an STI feature, the first height being greater than the fin height. A conduction metal layer is formed on the stress metal layer.
申请公布号 KR101386732(B1) 申请公布日期 2014.04.17
申请号 KR20120080237 申请日期 2012.07.23
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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