发明名称 SUBSTRATE MANUFACTURING METHOD AND THIN FILM DEPOSITION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a substrate manufacturing method which is unlikely to cause an irregularity on a surface of a thin film.SOLUTION: A substrate manufacturing method comprises: (a) coating a photocurable liquid thin film material on a surface of a substrate in a first region and inhibiting flowing of the thin film material coated on the first region to a neighboring second region across a border line by a flow inhibition structure; (b) coating a liquid thin film material on the second region in a state where flow of the thin film material in the first region to the second region is inhibited by the flow inhibition structure; and (c) curing at least a surface part of the thin film material coated on the first region and the second region by light irradiation.
申请公布号 JP2014067984(A) 申请公布日期 2014.04.17
申请号 JP20120214310 申请日期 2012.09.27
申请人 SUMITOMO HEAVY IND LTD 发明人 OKAMOTO YUJI
分类号 H05K3/28;H05K3/00 主分类号 H05K3/28
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