| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of preventing the mist generated by cleaning from being deposited on the periphery of a coating nozzle, even if cleaning the nozzle while discharging a coating liquid.SOLUTION: In a coating apparatus of this invention, an internal space L2 coming into contact with the lower surface of a wetted member 42 becomes a negative pressure, and an air flow 6 is generated toward the internal space L2 in the vicinity of the top surface of the wetted member 42. Accordingly, even if the mist is generated due to collision between a coating liquid discharged from coating nozzles 52a-52c and cleaning nozzles 45a-45c (cleaning solution during cleaning), the location of generating the mist among the air flow 6 is in the range of a downdraft area D that is the area of generating a downdraft, and the mist is absorbed into the internal space L2 with an ambient gas along the downdraft. Also, the mist is absorbed even by the absorbing processing of the cleaning nozzles 45a-45c. As a result, the mist is prevented from being deposited on the periphery of the coating nozzles 52a-52c. |
