| 摘要 |
PROBLEM TO BE SOLVED: To provide an effective electrostatic chuck refurbishing system, method and apparatus so that a refurbished electrostatic chuck can be reused.SOLUTION: A method of removing an epoxy band from an electrostatic chuck includes a step of securing the electrostatic chuck in a servicing fixture, a step of applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, a step of forming a hole in the epoxy band, and a step of pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described. |
