发明名称 |
MICROCHIP CHARGE PATTERNING |
摘要 |
A method of forming a charge pattern on a microchip includes depositing a material on the surface of the microchip, and immersing the microchip in a fluid to develop charge in or on the material through interaction with the surrounding fluid. |
申请公布号 |
US2014106541(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
US201213652194 |
申请日期 |
2012.10.15 |
申请人 |
PALO ALTO RESEARCH CENTER INCORPORATED |
发明人 |
CHOW EUGENE M.;LU JENGPING;VOLKEL ARMIN R.;HSIEH BING R.;WHITING GREGORY L. |
分类号 |
H01L21/78 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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