摘要 |
<p>The module (6) has a piezo actuator (1) comprising a piezo element. A protection layer system comprises an inner insulating layer and a metallic layer consisting of metal foils (2, 3), which are overlapped with each other such that lateral regions (2', 3') of one of the foils is projected by the other foil. The regions are pointed towards integrating parts (4, 5) such as actuator head and actuator base, and are connected with the parts in a sealed manner after coating the piezo actuator. The insulating layer comprises a PTFE molded hose, and a perfluoroether gel.</p> |