发明名称 |
GRAPHENE FIELD EFFECT TRANSISTOR WITH DIELECTRICS AND GATE ELECTRODES HAVING STABLE BEHAVIORS DESPITE HIGH STRAINS, AND MANUFACTURING METHOD OF THE SAME |
摘要 |
<p>The present invention relates to a graphene field effect transistor with dielectrics and gate electrodes having stable behaviors despite high strains and a method for manufacturing the same. According to an embodiment of the present invention, the method of manufacturing a graphene field effect transistor with dielectrics and gate electrodes having stable behaviors despite high strains includes a step of preparing a monolithically patterned graphene layer; a step of forming an insulating layer; and a step of forming a gate electrode. [Reference numerals] (AA) Patterned graphene; (BB) Rubber; (CC) Aerosol jet printing; (DD) Nozzle; (EE) Ion gel printing; (FF) Ethanol; (GG,HH) Stretch(transformation); (II) PEDOT:PSS printing; (JJ) Hexane evaporation</p> |
申请公布号 |
KR20140044763(A) |
申请公布日期 |
2014.04.15 |
申请号 |
KR20130119462 |
申请日期 |
2013.10.07 |
申请人 |
RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY |
发明人 |
AHN, JONG HYUN;CHO, JEONG HO;LEE, SUNG KI |
分类号 |
H01L29/786;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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