发明名称 Method for scanning electron microscope observation of sample floating on liquid surface
摘要 A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is floated on the surface of a hydrophilic ionic liquid aqueous solution to prevent the micro sample from being covered with the ionic liquid. A hydrophobic ionic liquid is used for hydrophilic samples. With the use of an ionic liquid aqueous solution of low viscosity and large flowability, the micro sample is allowed to freely aggregate, disperse, and align on the surface of the ionic liquid, and to refloat even when settled in the ionic liquid. For easy observation with a scanning electron microscope, the ionic liquid aqueous solution is dried to lower the flowability of the ionic liquid aqueous solution, after the form of the micro sample has stabilized and before electron microscope observation.
申请公布号 US8698079(B2) 申请公布日期 2014.04.15
申请号 US201113877710 申请日期 2011.09.16
申请人 SHIONO MASAMICHI;NISHIMURA MASAKO;KONOMI MAMI;KUWABATA SUSUMU;HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 SHIONO MASAMICHI;NISHIMURA MASAKO;KONOMI MAMI;KUWABATA SUSUMU
分类号 H01J37/20 主分类号 H01J37/20
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