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发明名称
感光性矽氧烷组成物、由它形成之硬化膜、及具有硬化膜之元件
摘要
申请公布号
TWI434141
申请公布日期
2014.04.11
申请号
TW096145065
申请日期
2007.11.28
申请人
东丽股份有限公司 日本
发明人
诹访充史
分类号
G03F7/075;H01L21/312
主分类号
G03F7/075
代理机构
代理人
何金涂 台北市大安区敦化南路2段77号8楼
主权项
地址
日本
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