CONDUCTING BELT FOR USE WITH ANODE HOLDER AND ANODE HOLDER

摘要

A conducting belt is used for an anode holder for supplying an electric current to an anode to plate a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating device. The conducting belt includes a belt capable of holding the anode by being in contact with an outer circumferential edge of the anode.