Thermal sensor device such as thermal flow sensor, has aerogel which is located on one side of membrane facing away from support substrate, so that membrane is mechanically reinforced

摘要

The thermal sensor device has a thermal element (16) arranged on membrane (10) which is mechanically reinforced by aerogels (22,32). The support substrates (12,26) are provided with recesses (14,28) through which the membrane is arranged. The recess is provided with fluidic structure (36) which is in thermal contact with the membrane and/or thermal element. The fluidic structure is provided with a fluid channel for allowing flow of fluid (18) into the membrane. The aerogel (32) is located on one side of the membrane facing away from support substrate (26).