| 摘要 |
PROBLEM TO BE SOLVED: To attain high precision and fineness by uniformly and finely forming pixel electrodes to increase detection sensitivity of a radiation detector using gas amplification that has strip-shaped cathode electrodes, strip-shaped anode electrodes, and the pixel electrodes connected to the strip-shaped anode electrodes.SOLUTION: In a tabular resin substrate, a plurality of first strip-shaped electrodes are formed at regular intervals so as to be along at least one side of the resin substrate on its main surface. Next, a dry film resist is formed so as to cover the plurality of first strip-shaped electrodes on the main surface of the resin substrate. Then, the dry film resist is exposed and developed to form a plurality of cylindrical through-holes through the dry film resist along at least the one side and at least along a direction orthogonal to the side, on the plurality of strip-shaped electrodes on the resin substrate. After that, a plating treatment is applied to the plurality of cylindrical through-holes to fill each of the plurality of cylindrical through-holes with a plating material. |
