| 摘要 |
PROBLEM TO BE SOLVED: To provide a component inspection device which inspects an electronic component having been exposed to a low-temperature environment, and stably operates by taking measures against frosting and freezing of transfer means of transporting the electronic component.SOLUTION: An inspection chamber 2 and a transfer chamber 3 in a low-temperature environment where an inspection part 21 for inspecting an electronic component D is arranged are adjacently arranged, and a rotary pickup 8 which transfers the electronic component D onto a turntable 6 conveying the electronic component to an inspection part 21 is arranged in the transfer chamber 3. The turntable 6 is arranged partially projecting from a partition wall part 5, partitioning off the inspection chamber 2 and transfer chamber 3, to the transfer chamber 3, and the rotary pickup 8 transfers the electronic component D onto the turntable 6 in a projection border-crossing section B. |
