发明名称 NITRIDE SEMICONDUCTOR STRUCTURE, LAMINATE STRUCTURE, AND NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT
摘要 <p>A nitride semiconductor structure having an m surface as a primary surface, wherein the structure is provided with a plurality of crystal-growth seed regions (130) comprising a nitride semiconductor extending at an angle in a range of 0-10° in relation to an a-axis, and a horizontal-direction growth region (320b) comprising a nitride semiconductor spread in the c-axis direction from each of the plurality of crystal-growth seed regions, the interval (S width) between adjacent crystal-growth seed regions being at least 20 µm.</p>
申请公布号 WO2014054284(A1) 申请公布日期 2014.04.10
申请号 WO2013JP05887 申请日期 2013.10.02
申请人 PANASONIC CORPORATION 发明人 CHOE, SONGBAEK;YOSHIDA, SHUNJI;YOKOGAWA, TOSHIYA
分类号 H01L21/205;C23C16/34;C30B25/02;C30B29/38;H01L21/02;H01L21/20 主分类号 H01L21/205
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