发明名称 |
NITRIDE SEMICONDUCTOR STRUCTURE, LAMINATE STRUCTURE, AND NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT |
摘要 |
<p>A nitride semiconductor structure having an m surface as a primary surface, wherein the structure is provided with a plurality of crystal-growth seed regions (130) comprising a nitride semiconductor extending at an angle in a range of 0-10° in relation to an a-axis, and a horizontal-direction growth region (320b) comprising a nitride semiconductor spread in the c-axis direction from each of the plurality of crystal-growth seed regions, the interval (S width) between adjacent crystal-growth seed regions being at least 20 µm.</p> |
申请公布号 |
WO2014054284(A1) |
申请公布日期 |
2014.04.10 |
申请号 |
WO2013JP05887 |
申请日期 |
2013.10.02 |
申请人 |
PANASONIC CORPORATION |
发明人 |
CHOE, SONGBAEK;YOSHIDA, SHUNJI;YOKOGAWA, TOSHIYA |
分类号 |
H01L21/205;C23C16/34;C30B25/02;C30B29/38;H01L21/02;H01L21/20 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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