| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric conversion element which inhibits a dark current.SOLUTION: A manufacturing method of a photoelectric conversion element including a substrate, a first electrode film which is formed on the substrate and has a first conductive film and a second conductive film, a metal compound film formed to cover the first electrode film, a semiconductor film formed to be connected with the metal compound film, a second electrode film formed to be connected with the semiconductor film and an insulation film which covers and surrounds the substrate, the first electrode film, the semiconductor film and the metal compound film comprises: a first electrode film formation process of forming the first conductive film by being connected with the substrate and the second conductive film by being connected with the first electrode film; a first patterning process of forming the second conductive film by wet etching into a predetermined shape subsequent to the first electrode film formation process; and a metal compound film formation process of forming the metal compound film which covers the first electrode film subsequent to the first patterning process. |
