发明名称
摘要 <p>A method of manufacturing a through electrode-attached glass substrate includes: forming a plurality of electrode through holes and a dummy through hole in plate-shaped glass; inserting electrode members into the electrode through holes; welding the plate-shaped glass and the electrode members by heating the plate-shaped glass at a temperature that is higher than a softening point thereof; and grinding both sides of the plate-shaped glass together with the electrode members so as to expose a plurality of the electrode members to both sides of the plate-shaped glass and configure the plurality of the electrode members as a plurality of through electrodes that are electrically separated from each other.</p>
申请公布号 JP5466102(B2) 申请公布日期 2014.04.09
申请号 JP20100156170 申请日期 2010.07.08
申请人 发明人
分类号 H01L23/04;H01L23/08;H01L23/12;H03H3/02;H03H9/02 主分类号 H01L23/04
代理机构 代理人
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