摘要 |
<p>A method of manufacturing a through electrode-attached glass substrate includes: forming a plurality of electrode through holes and a dummy through hole in plate-shaped glass; inserting electrode members into the electrode through holes; welding the plate-shaped glass and the electrode members by heating the plate-shaped glass at a temperature that is higher than a softening point thereof; and grinding both sides of the plate-shaped glass together with the electrode members so as to expose a plurality of the electrode members to both sides of the plate-shaped glass and configure the plurality of the electrode members as a plurality of through electrodes that are electrically separated from each other.</p> |