发明名称 VERTICAL TRANSISTOR PHASE CHANGE MEMORY
摘要 <p>Vertical transistor phase change memory and methods of processing phase change memory are described herein. One or more methods include forming a dielectric on at least a portion of a vertical transistor, forming an electrode on the dielectric, and forming a vertical strip of phase change material on a portion of a side of the electrode and on a portion of a side of the dielectric extending along the electrode and the dielectric into contact with the vertical transistor.</p>
申请公布号 KR101384061(B1) 申请公布日期 2014.04.09
申请号 KR20127030051 申请日期 2011.04.11
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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