发明名称 Device for connecting nano-objects to external electrical systems, and method for producing said device
摘要 Device for connecting nano-objects to external electrical systems, and method for producing the device. According to the invention, which applies in particular to molecular characterization, a device including the following is produced: an upper layer equipped with upper contact pads to be connected to a nano-object; a lower layer, equipped with lower contact pads to be connected to an external electrical system; above the lower layer, a bonding layer including electrical through-vias in contact with the lower pads; and, between the bonding layer and the upper layer, at least two layers equipped with conductive lines and electrical vias, for connecting the upper pads to the lower pads.
申请公布号 US8692385(B2) 申请公布日期 2014.04.08
申请号 US201113311146 申请日期 2011.12.05
申请人 THUAIRE AURELIE;BAILLIN XAVIER;SILLON NICOLAS;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 THUAIRE AURELIE;BAILLIN XAVIER;SILLON NICOLAS
分类号 H01L23/52;B82Y10/00 主分类号 H01L23/52
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