发明名称 Methods and apparatus for simultaneously inspecting multiple array regions having different pitches
摘要 One embodiment relates to a method of automatically inspecting multiple array regions (102) simultaneously using an imaging apparatus (302). The method includes selecting (211 or 212) an optimal pixel size such that each array region in the multiple array regions has a grouped cell which is an integer number of pixels in size, and adjusting a pixel size of the imaging apparatus to be the selected optimal pixel size. Optimal pixel sizes within an available range of pixel sizes may be determined by finding (202) a largest common divider of cell sizes of the multiple array regions when the cell sizes are expressed in integers. Pre-set criteria may be applied to determine (208) which, if any, of the optimal pixel sizes are acceptable based on pre-set criteria. If none of the optimal pixel sizes are acceptable, then one of the array regions may be marked for digital interpolation (see 216). Other embodiments, aspects, and features are also disclosed.
申请公布号 US8692878(B2) 申请公布日期 2014.04.08
申请号 US201013062934 申请日期 2010.06.18
申请人 CHEN HONG;LIN JASON Z.;KLA-TENCOR CORPORATION 发明人 CHEN HONG;LIN JASON Z.
分类号 H04N7/18 主分类号 H04N7/18
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