发明名称 SUBSTRATE INSTECTION APPARATUS AND SUBSTRATE INSTECTION METHOD
摘要 The objective of the present invention is to provide a substrate testing apparatus that facilitates adjustment of a press fitting amount of a plurality of testing probes included in a testing head to a proper value or range and that allows for quick testing. To achieve the objective, the substrate testing apparatus (10) tests whether a substrate (1) is good or not by measuring electrical characteristics of the substrate (1) and the substrate testing apparatus (10) comprises at least one testing head (20U) (or 20D), a moving mechanism (50), an analog manipulating part (15), and a control means (70). The analog manipulating part (15) performs manipulation for analog adjustment to control the amount of movement of the testing head by the moving mechanism (50). The control means (70) controls the amount of movement of the moving mechanism according to the amount of adjustment of the analog manipulating part to adjust the press fitting amount when the plurality of testing probes of the testing head (20U) contact testing contacts of the substrate.
申请公布号 KR20140042669(A) 申请公布日期 2014.04.07
申请号 KR20130107106 申请日期 2013.09.06
申请人 NIDEC-READ CORPORATION 发明人 NAKAYAMA TAKAHUMI;YAMAGUCHI OSAMU;ONCHI ISAO;HATTA SHIGETOSHI
分类号 G01R31/28;G01R1/067 主分类号 G01R31/28
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