SUPPORTING UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE UNIT, AND METHOD FOR MANUFACTURING THE UNIT

摘要

A supporting unit is disclosed. The support unit includes: a supporting plate placed on the upper surface of the supporting unit; and a heater provided with a constant pattern in the lower surface of the support plate and heating the supporting plate. The heater includes: a first metal layer coated on the lower surface of the plate; an anti-oxidation layer of a conductive material coated on the metal plating layer; and a second metal plating layer of a conductive material coated on the anti-oxidation layer in a part of the pattern.