发明名称 CRYSTAL GROWING APPARATUS
摘要 The present invention relates to a crystal growth apparatus, including: a crucible where seed crystals and a raw material are prepared; first and second heating coils installed on the outside of the crucible. The first and second heating coils are connected to a single power source in a row. The interval between the first and second heating coils can be adjusted, so as for respective inductance values of the first and second heating coils to change. Thereby, for each part of the crucible for the growth of crystals, excellent minute control of calorific power and adjustment of cooling power can be provided.
申请公布号 KR20140041250(A) 申请公布日期 2014.04.04
申请号 KR20120108351 申请日期 2012.09.27
申请人 PSTEX CO., LTD. 发明人 SUNG, BYOUNG GEE
分类号 C30B23/02;C30B29/36;H01L21/205 主分类号 C30B23/02
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