PEELING DEVICE, PEELING SYSTEM, AND PEELING METHOD

摘要

PROBLEM TO BE SOLVED: To improve the efficiencies of peeling process.SOLUTION: A peeling device comprises: a first holding part; a notch part; a measurement part; and a position adjustment part. The first holding part holds a first substrate of a superposed substrate formed by jointing a first substrate and the second substrate. The notch part notches to a junction between the first substrate and the second substrate. The measurement part measures a distance from a predetermined measurement reference position to a holding surface of the holding part, or a distance from the measurement reference position to an object between the measurement reference position and the holding surface. The position adjustment part adjusts a notch position of the notch part on the basis of the result of the measurement part and information previously obtained about the thickness of the superposed substrate.