发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To alleviate labor and time required to arrive at the improper position of aluminum wirings by attaching markers for every predetermined pieces of aluminum wirings to allow the number of the wirings to be easily counted. CONSTITUTION:Bit lines 1 of a plurality of aluminum wirings are formed on the upper layer of a semiconductor device, and markers 2 are formed, for exam ple, every 5 of the lines 1. The markers 2 can be easily formed by patterning in the same mask when the wirings 1 are patterned. When specific improper bit is intended to be observed by a microscope, they are counted one, two, three,... with the marker 2 as a reference. Even if they are erroneously counted, it is not necessary to recount them by returning to the end of the lines 1, but they may be counted from the marker 2. Since the bit lines 2 are distinguished by the marker 2, the counting error of the lines 2 is reduced.
申请公布号 JPS63254718(A) 申请公布日期 1988.10.21
申请号 JP19870089086 申请日期 1987.04.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 YASUE TAKAO
分类号 H01L21/02;H01L21/66 主分类号 H01L21/02
代理机构 代理人
主权项
地址