发明名称 METHOD FOR FORMING FINE PATTERN, AND FINE PATTERN FORMED USING SAME
摘要 The present invention relates to a method for forming a fine pattern and, more particularly, to a method for forming a fine pattern only by means of sputtering. The present invention is configured such that a fine pattern can be formed easily and at a low cost, and thus can provide a method for forming a fine pattern having excellent productivity and economical advantage.
申请公布号 WO2014051355(A1) 申请公布日期 2014.04.03
申请号 WO2013KR08634 申请日期 2013.09.26
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 SONG, YOUNG SIK
分类号 H01L21/203 主分类号 H01L21/203
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