COMPONENT ANALYZING DEVICE AND COMPONENT ANALYZING METHOD

摘要

An impurity analyzing device (10), which is one embodiment of this component analyzing device, comprises a liquid dispersion generating unit (1), and the liquid dispersion generating unit (1) performs laser ablation by irradiating a solid target (50) immersed in a liquid (15) with a laser beam (70), generating particulates, and causing the same to disperse in the liquid (15). A sample for the impurity analysis is obtained by dissolving the particulates in this dispersion liquid with an acid solution.