PIEZOELECTRIC MOTOR, ROBOT HAND, ROBOT, ELECTRONIC COMPONENT TRANSPORT DEVICE, ELECTRONIC COMPONENT INSPECTION EQUIPMENT, LIQUID FEED PUMP, PRINTING EQUIPMENT, ELECTRONIC CLOCK, PROJECTION APPARATUS, AND TRANSPORT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric motor having a vibrator case that can ensure high drive accuracy while suppressing the enlargement of the piezoelectric motor.SOLUTION: A vibrator case is made up by a first side part and a second side part disposed both sides thereof against a vibrator in a bending direction, and a coupling part for connecting the first side part and the second side part. As a result, the rigidity of the vibrator in the bending direction becomes higher and the distortion of the vibrator case can be minimized. As the structure also can downsize the vibrator case if the same rigidity is maintained, the vibrator case can be downsized with high rigidity. Therefore, a piezoelectric motor ensuring sufficiently high driving accuracy while suppressing the enlargement of the piezoelectric motor can be achieved.