| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive pattern and a manufacturing method of the same.SOLUTION: A manufacturing method of a conductive pattern comprises: a) a step of forming a conductive film on a substrate; b) a step of forming an etching resist pattern on the conductive film; and c) a step of forming the conductive pattern having a line width smaller than a width of the etching resist pattern by over-etching the conductive film by using the etching resist pattern. A conductive pattern manufactured by the manufacturing method is also provided. According to the present embodiment, the conductive pattern having an ultrafine line width can be efficiently and economically provided. |
