发明名称 TRANSISTOR FORMATION USING COLD WELDING
摘要 A device and method for fabrication includes providing a first substrate assembly including a first substrate and a first metal layer formed on the first substrate and a second substrate assembly including a second substrate and a second metal layer formed on the second substrate. The first metal layer is joined to the second metal layer using a cold welding process wherein one of the first substrate and the second substrate includes a semiconductor channel layer for forming a transistor device.
申请公布号 US2014094006(A1) 申请公布日期 2014.04.03
申请号 US201213633973 申请日期 2012.10.03
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG CHENG-WEI;HAN SHU-JEN;KOBAYASHI MASAHARU;LEE KO-TAO;SADANA DEVENDRA K.;SHIU KUEN-TING
分类号 H01L21/60;H01L21/336 主分类号 H01L21/60
代理机构 代理人
主权项
地址