| 摘要 |
A micro-electro-mechanical systems (MEMS) autofocus actuator having a support member for supporting a lens element, the support member including a stationary portion and a movable portion, the movable portion attached to the stationary portion by a movable support beam. An electrostatic drive member is attached to the stationary portion and the movable portion to drive movement of the movable portion with respect to the stationary portion. A lens holder is suspended within the support member by a resilient arm member attached to the movable portion and a deflection beam attached to the stationary portion so that in a non-actuated state, the lens element is in a first focal position that is substantially out-of-plane with respect to the stationary portion, and in an actuated state, the lens element is in a second focal position, the second focal position being different from the first focal position. |
