发明名称 |
A SELF-IMAGEABLE FILM FORMING POLYMER, COMPOSITIONS THEREOF AND DEVICES AND STRUCTURES MADE THEREFROM |
摘要 |
Polymers and compositions for forming self-imageable films encompassing such polymers that encompass norbornene-type repeating unit having at least one phenolic functionality and maleic anhydride-type repeating unit, which can be formulated to be either positive tone imaging or negative tone imaging. The films formed thereby are useful as self-imageable layers in the manufacture of microelectronic, such as semiconductor, and optoelectronic devices. |
申请公布号 |
EP2643371(B1) |
申请公布日期 |
2014.04.02 |
申请号 |
EP20110797070 |
申请日期 |
2011.11.23 |
申请人 |
PROMERUS, LLC;SUMITOMO BAKELITE CO., LTD. |
发明人 |
ONISHI, OSAMU;IKEDA, HARUO;RHODES, LARRY, F.;KANDANARACHCHI, PRAMOD |
分类号 |
C08F222/06;C08F210/14;C08F220/52;G03F7/038 |
主分类号 |
C08F222/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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