| 摘要 |
PROBLEM TO BE SOLVED: To allow an air volume and a flow rate to be uniformized by arranging a control wall having an opening between a first discharge hole and a second discharge hole, though usually a large amount is discharged from a supply hole to a first discharge hole at a position facing a supply hole, gas having passed through the opening is discharged from the first discharge hole, and gas blocked with the control wall is not discharged from the first discharge hole but discharged from the other second discharge hole, and further by arranging a second control wall having an open portion between the second discharge hold and a third discharge hole. SOLUTION: An air volume control mechanism of a multi-branch chamber, which has the supply hole and discharge holes, and which is formed with a hollow box body, has the first discharge hole at the position facing the supply face, the second discharge hole at the side of the supply hole of the first discharge hole, and the third discharge hole, has the first control wall which is provided between the first discharge hole and the second discharge hole and which has an opening portion, and the second control wall which is provided between the second discharge hole and the third discharge hole and which has an opening portion in the periphery. COPYRIGHT: (C)2012,JPO&INPIT |
