ANTIMONY PRECURSORS WITH AMINOTHIOLATE, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to an antimony precursor denoted by chemical formula 1. The antimony precursor is a precursor which includes sulfur and does not require the addition of separate sulfur for the production of a thin film, and enables users to produce a high quality antimony thin film by having improved thermal stability and volatility. In chemical formula 1: R1 and R2 are independently a C1-C10 linear or branched alkyl group; R3 and R4 are independently a C1-C10 linear or branched alkyl or fluoroalkyl group; and n is a number selected from 1-3.